A journal of IEEE and CAA , publishes high-quality papers in English on original theoretical/experimental research and development in all areas of automation
Volume 5 Issue 1
Jan.  2018

IEEE/CAA Journal of Automatica Sinica

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Article Contents
Fajun Yang, Naiqi Wu, Yan Qiao and Rong Su, "Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets," IEEE/CAA J. Autom. Sinica, vol. 5, no. 1, pp. 270-280, Jan. 2018. doi: 10.1109/JAS.2017.7510772
Citation: Fajun Yang, Naiqi Wu, Yan Qiao and Rong Su, "Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets," IEEE/CAA J. Autom. Sinica, vol. 5, no. 1, pp. 270-280, Jan. 2018. doi: 10.1109/JAS.2017.7510772

Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets

doi: 10.1109/JAS.2017.7510772
Funds:

Science and Technology Development Fund (FDCT) of Macau 106/2016/A3

the National Natural Science Foundation of China U1401240

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  • A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots' waiting time. Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.

     

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